top of page
OIL DIFFUSION PUMP
Diffusion pump vacuum oil is sprayed in the molecular state or as vapor and is used to obtain a vacuum state. It is required that it is chemically stable, such as by having a low vapor pressure, by not deteriorating due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).
Neovac
SY
For surface treatment equipment (vapor deposition, sputter, heat treatment)
bottom of page