Pump / Valve Oil: 
Neovac - Vacuum Pump Oils

"NEOVAC" is widely known as a synonym for high vacuum pump oil. The high reliability of its performance has led to it being recommended by many vacuum pump manufacturers as the oil to be used. It is used on vacuum equipment for semiconductors, silicon wafers, vapor deposition, heat treatment and packaging, and it contributes to improved productivity.

Rotary Pump Oil

The vacuum oil on a rotary pump is used for lubrication and to maintain airtightness. It is important that it has a low vapor pressure and the appropriate viscosity and that it is difficult to emulsify (it has anti-emulsification properties). In other words, it must easily separate from water and it must be easy to remove the water.                                        
Product Name
Viscosity (mPa*s, 40 °C)
Flash Point (°C)
Appearance
Merits and Applications
Category
NEOVAC MR-250A
105
270
Light Yellow
NEOVAC MR-250A adds heat resisting and anti-oxidation properties to the MR-200, supporting moisture suction.
Rotary Pump Oil
NEOVAC MR-200A
71
256
Light Yellow
NEOVAC MR-200A adds heat resisting and anti-oxidation properties to the MR-200, supporting moisture suction.
Rotary Pump Oil
NEOVAC MR-250
105
270
Light Yellow
NEOVAC MR-250 is used when larger pumps that require more performance over MR-100 and MR-200
Rotary Pump Oil
NEOVAC MR-200
71
256
Light Yellow
NEOVAC MR-200 is a standard reliable vacuum pump oil for rotary pumps
Rotary Pump Oil
NEOVAC MR-100
44
230
Light Yellow
NEOVAC MR-100 is a standard reliable vacuum pump oil for compact pumps

Diffusion Pump Oil

Diffusion pump vacuum oil is sprayed in the molecular state or as vapor and is used to obtain a vacuum state. It is required that it is chemically stable, such as by having a low vapor pressure, by not deteriorating due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).                                        
Product Name
Viscosity (mPa*s, 40 °C)
Flash Point (°C)
Appearance
Merits and Applications
Category
NEOVAC SY
26
240
Light Yellow
For surface treatment equipment (vapor deposition, sputter, heat treatment)
Diffusion Pump Oil

Mechanical Booster Pump Oil

These are pumps that increase the flow speed like a turbocharger on a car engine. Vacuum oil is used on mechanical boosters for the lubrication of the bearings and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.
Product Name
Viscosity (mPa*s, 40 °C)
Flash Point (°C)
Appearance
Merits and Applications
Category
NEOVAC EP-83
84
240
Light Yellow
This demonstrates excellent performance as a lubricating oil for the gear part of mechanical booster pumps.
Mechanical Booster Pump Oil

Center Valve Oil

A center valve is used as the rotating part on bulb manufacturing equipment. Center valve oil is used for the lubrication of its sliding surface and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.                                        
Product Name
Viscosity (mPa*s, 40 °C)
Flash Point (°C)
Appearance
Merits and Applications
Category
NEOVAC MC-400
160
280
Light Yellow
For center valve lubrication on equipment producing fluorescent lamps and bulbs
Center Valve Oil